Brief Description

This vacuum baking furnace is designed to remove the semiconductor such as the surface deposits (GaN, GaAs, InGaASP) of the graphite wafer carrier (susceptor) on the organometallic chemical vapor phase epitaxial wafer The carrier plate is clean and reusable. VACLONG is unique in the industry, applying vacuum technology to the above functions and developing the BACKING furnace process. Although the industry has imitated successively, VACLONG vacuum furnaces have been marketed worldwide for more than 26 years and have been used by wafer epitaxial wafer manufacturers for MOCVD equipment.